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Capability

electron beam lithography

Suppliers
2
States & provinces
2
Countries
2

2 electron beam lithography suppliers across 2 states and provinces in 2 countries. Profiles show capabilities, materials, certifications, and facility locations so you can compare shops and build a shortlist.

Suppliers

APPLIED NANOTOOLS INC

EDMONTON, AB

Applied Nanotools Inc. is a nanofabrication foundry offering rapid prototyping and low-to-mid volume production services. It provides X-ray and EUV optics, calibration standards, gratings, zone plates, metalenses, and integrated photonics fabrication using state-of-the-art 100 keV electron beam lithography.

anisotropic plasma etchdeep trench etchingICP-RIE etchingmetalens fabricationmetallizationnanofabricationoxide cladding depositionphotonic integrated circuit fabricationreactive ion etching

JC Nabity Lithography Systems produces the Nanometer Pattern Generation System (NPGS), a direct write lithography system for electron beam and ion beam lithography using a commercial SEM, STEM, FIB, dual beam (SEM/FIB), or Helium Ion microscope. The company describes NPGS as the top selling SEM lithography system at research institutions in North America, with widespread use around the world.

direct write lithographyion beam lithography

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Other processes offered by the shops that list electron beam lithography.

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