atmospheric pressure processing

Expertech designs and supports thermal processing equipment for semiconductor and MEMS applications, including Compact Thermal Reactors (CTRs) and Vertical Thermal Reactors (VTRs). Its fully automated diffusion and LPCVD furnaces offer atmospheric pressure and LPCVD processes with recipe-driven loading and processing. The company provides new and refurbished systems, retrofits, system rebuilds, installation, technical support, and spares.

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diffusion processingLPCVD processingretrofits and system rebuildssystem installationtechnical support